PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. It compiles information from several government agencies and organizations. �o�-ӥ4^8���j+� �D_g��*3���'�V�%pd5 �%҈]���FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8����вt��F�QpU���.c��h�6� �ͱd�Y��==0�K��*b5�)+�>������J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-���rO.��RO���.�=��G��j�}z]U4���(E��r�!h Publication #0100Doc. Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. 0000075589 00000 n 0000068627 00000 n 0000004372 00000 n This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. 0000002109 00000 n Gives off irritating or toxic fumes (or gases) in a fire. (2016). �&���ֵ`ǂP׬��ZXص몬"��(�ˢ+d���33!�������/����2�����>�\�BjB�9cŲ�����{^DH�0{�o���!Ʉ���\�j��:� 39 38 values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. TLV-TWA (ACGIH) LD50 (Species & Routes) INGREDIENTS CAS NUMBER % (VOL) LC50 (Rat, 4 hrs.) xڤ�|TU�?~ι����5��Lf2� %�U�J�$��� Formula. American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. 3. as inhalable particulate). BCl 3. Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … Oral, esophageal, and stomach burns are common. boron trichloride ACGIH TLV (United States, 3/2017). DOT ID & Guide. Boron trichloride. 0000016905 00000 n Documentation, Publications, and Data. TLV ® /BEI ® Guidelines. 1986]. Atomic layer etch and pulsed plasma etch. Corrosive to metals and tissue and is toxic. %PDF-1.6 %���� Boron trichloride . Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. 0000016647 00000 n For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. 0000007497 00000 n 0000005215 00000 n 0000000016 00000 n 0000009952 00000 n 0000001461 00000 n Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. �. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. This chemical inventory is OSHA's premier one-stop shop for occupational chemical information. See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. NACRES NA.22 Boron trichloride is a boron halide. H331 Toxic if inhaled. Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. Hazards Identification Toxic, corrosive liquid and gas under pressure. x�]��j�0F���l/���l���B.����8��5ll�8y���oڅ �p�g4G#OQ�w��_����’�����u��mȏ�������E ���LYc��.��4�Vŏ�t]��æ���6wa��ï��Xn��'\°���uN1��f��\B���}�����?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S������ �@y�`T����J��7B��t��W��^/� �&l������P�Ƽ���Ȏ �%�G����c9>V>ª |*��x�c�S*���|,5� ���>ڔ >^c�SU �O��B>�|��%�qL-���|�U|,[/����>�|J]�O� �cy�K��I�},�O�҇�,|},|J���q,�§T��c�-�Cm� ��6�7�����(��1�ч��ۆ}$]��7-%�����೥����f9����F��(��i~?����$�O>̈́4�>�M���9��4�0b�p��9��q�cP��}�2� 0000006540 00000 n %%EOF 3), boron tribromide (TLV-Ceiling = 10 mg/m. Boron fluoride, Trifluoroborane CAS No. 0000002876 00000 n Vomitus generally has a … 0000014413 00000 n Molecular Weight 179.30 . 3), boron oxide (TLV-TWA = 10 mg/m. 0000005884 00000 n �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕���%�#��� 2�LLL�'9���Txl��`�����)�?y�#ρ43�b E ۪ @Z���j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream Related. Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: 3), and inorganic borates (TLV-TWA = 2 mg/m. startxref Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. 0000011003 00000 n Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. 0000008891 00000 n trailer 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. Christopher F. Carvalho and Melvyn V. Sargent Abstract. UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. Cited by. Q����Q��'��L+Tl�j�]}�ï���>u߄�X�M=�m�X>�����%�) 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream %PDF-1.4 %���� Boron trichloride appears as a colorless gas with a pungent odor. 0000013362 00000 n NO water. BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … C: 0.7 ppm Section 8. 1270 ppm None currently established. Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 0000001540 00000 n 1008 125. RID-TRAPPER . About. 0000016776 00000 n 0 Boron trichloride as a selective demethylating agent for hindered ethers . x�b```b``�g`c`�]� Ȁ ��@Q� ���� �R]�A��d���畯0�FV���,A)�zs���e&Opt�,��(2�t�������|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt����������k�˸�f 2a�A�`��3�DU��-���+ie 6{K�������[ô�(f#V�;� UBE RID . threshold limit value (tlv) the amount of a gas/fumes exposure for 8 hours a day for 5 days a week without any harmful effects. H300 Fatal if swallowed. 7637-07-2 RTECS No. 39 0 obj <> endobj 0000003028 00000 n Emergency Overview 3. Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. Repeated exposure of skin to vapours may result in dermatitis. MDL number MFCD00013208. ���O9�v՘�#��Qk�z����R��z�ħ���0�ԨF, ED2275000. Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 0000039019 00000 n It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. Use explosion-proof 0000001056 00000 n 0000038041 00000 n Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. xref It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. Back to tab navigation. 0000076224 00000 n 0000038768 00000 n Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. PubChem Substance ID 24854843. We offer boron trichloride in a variety of purities and concentrations. Boron trichloride 100 10294-34-5 Not applicable. <<6A1A5510015C1240B3086346058393D6>]>> 0000003655 00000 n Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. 0000001682 00000 n 0000008156 00000 n Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. H��UMo�0��W�� �J���0��v�!�B�b�3l��#%;I[gݖ���G=>>Q Cincinnati, Ohio : ACGIH. H336 May cause drowsiness or dizziness. B Boron trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones. It is soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. It participates in the hydroboration of alkenes. It is toxic by inhalation. 0000076859 00000 n 0000038525 00000 n Causes eye, skin, and respiratory tract burns. BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. H314 Causes severe skin burns and eye damage. Boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of the skin. endobj 6 0 obj <>stream 0000068547 00000 n Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. Harmful or fatal if inhaled. Fumes irritate the eyes and mucous membranes. 0000003003 00000 n !� ���Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. 3.5 TLV-STEL: Not listed. 0000015591 00000 n SpecialProvisions open all close all. Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. 0000068954 00000 n endstream In case of fire in the surroundings, use appropriate extinguishing media. Boron trifluoride is a colorless gas with a pungent odor. 0000068885 00000 n 3.4 TLV-TWA: Not listed. 3.6 TLV-Ceiling: Not listed. Exposure controls / personal protection. 0000012184 00000 n In dermatitis, corrosive liquid and gas under pressure its TLV ® or BEI ® is derived Routes... Purities and concentrations acid, a … boron trichloride gas may cause severe irritation, chemical burns with ulceration scarring. 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